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FB 10 / Mathematik und Naturwissenschaften
Institut für Physik
Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik
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Dissertationen
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https://kobra.uni-kassel.de/handle/123456789/2006042510150
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search.filters.author.Georgiev, Georgi Todorov
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search.filters.author.Ivanov, Tzvetan
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search.filters.author.Volland, Burkhard E.
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530 'Physics'
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search.filters.subject.Mikrosystemtechnik
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search.filters.subject.Deposition
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search.filters.subject.Dünnschichttechnik
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2004 - 2005
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End date: 2009
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Piezoresistive cantilevers with an integrated bimorph actuator
(
2004-07-26
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
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Lithography-free micro- and nanostructuring based on conventional plasma etching
(
2005-02-02
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
;
Röll, Klaus (Prof. Dr.)
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Profile simulations of gas chopping etching processes : model development and comparison with experiments
(
2004-07-27
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
;
Röll, Klaus (Prof. Dr.)
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