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FB 10 / Mathematik und Naturwissenschaften
Institut für Physik
Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik
Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik
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search.filters.author.Soßna, Eva
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search.filters.subject.MEMS
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search.filters.subject.Silicium
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2004
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Herstellung von spannungsoptimierten Silizium-Membranen durch den elektrochemischen Ätzstopp an pn-Übergängen
(
2004-12-15
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
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