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FB 10 / Mathematik und Naturwissenschaften
Institut für Physik
Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik
Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik
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search.filters.author.Georgiev, Georgi Todorov
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search.filters.author.Ivanov, Tzvetan
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search.filters.author.Kilian, M.
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search.filters.author.Marian, V. G.
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search.filters.author.Scholz, W.
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530 'Physics'
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search.filters.subject.Plasmaätzen
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620 'Engineering and applied operations'
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search.filters.subject.Deposition
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2004 - 2007
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1 - 4 of 4
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Piezoresistive cantilevers with an integrated bimorph actuator
(
2004-07-26
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
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Theoretical and experimental analysis of a partially textured thrust bearing with square dimples
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2007
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Lithography-free micro- and nanostructuring based on conventional plasma etching
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2005-02-02
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
;
Röll, Klaus (Prof. Dr.)
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Profile simulations of gas chopping etching processes : model development and comparison with experiments
(
2004-07-27
)
Kassel, Universität, FB 18, Naturwissenschaften, Institut für Physik
;
Kassing, Rainer (Prof. Dr.)
;
Röll, Klaus (Prof. Dr.)
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