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Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces
This research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.
CitationIn: Optical and Quantum Electronics Volume 53 / Issue 5 (2021-04-18) eissn:1572-817X
SponsorshipGefördert im Rahmen des Projekts DEAL
CollectionsPublikationen (Artikel im Open Access gefördert durch die UB)
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