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Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies

dc.date.accessioned2023-05-19T09:09:48Z
dc.date.available2023-05-19T09:09:48Z
dc.date.issued2023-01-12
dc.identifierdoi:10.17170/kobra-202305198055
dc.identifier.urihttp://hdl.handle.net/123456789/14725
dc.description.sponsorshipGefördert im Rahmen des Projekts DEAL
dc.language.isoeng
dc.rightsNamensnennung 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.subjecthigh-speed sensoreng
dc.subjectinterferometric confocal distance sensoreng
dc.subjectoptical profilometereng
dc.subjectminiaturized point sensoreng
dc.subjectfiber coupled sensoreng
dc.subjectroughness measurementeng
dc.subjectfiber opticseng
dc.subject.ddc600
dc.subject.ddc530
dc.titleMiniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencieseng
dc.typeAufsatz
dcterms.abstractPoint-wise measuring profilometers like the tactile stylus instruments or optical sensors are established measurement tools in science and industry to measure and characterize surface textures. We present a fiber-coupled laser interferometric confocal distance sensor for surface profiling. The sensor is characterized by small geometric dimensions and by its high lateral scanning speed. The ability to measure specularly reflecting and rough surface textures are demonstrated by performing several measurements on a sinusoidal standard as well as two roughness standards specified by different degree of roughness using various lateral scan velocities up to 75 mm s-¹. These measurement results are compared to those obtained by a tactile stylus instrument used in the identical measurement environment as the introduced optical sensor. Finally, the ability for full-field measurements is presented.eng
dcterms.accessRightsopen access
dcterms.creatorHagemeier, Sebastian
dcterms.creatorBittner, Kai
dcterms.creatorDepiereux, Frank
dcterms.creatorLehmann, Peter
dcterms.extent9 Seiten
dc.relation.doidoi:10.1088/1361-6501/acaf97
dc.subject.swdInterferometrieger
dc.subject.swdRauigkeitsmessungger
dc.subject.swdFaseroptikger
dc.type.versionpublishedVersion
dcterms.source.identifiereissn:1361-6501
dcterms.source.issueNumber 4
dcterms.source.journalMeasurement Science and Technologyeng
dcterms.source.volumeVolume 34
kup.iskupfalse
dcterms.source.articlenumber045104


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