Datum
2023-06-26Schlagwort
620 Ingenieurwissenschaften Konfokale MikroskopieAlgorithmusSchichtdickeSignalanalyseSignalverarbeitungMetadata
Zur Langanzeige
Aufsatz
A novel cubic-exp evaluation algorithm considering non-symmetrical axial response signals of confocal microscopes
Zusammenfassung
The depth discrimination in confocal microscopy is based on the digital analysis of depth response signals obtained by each camera pixel during measurement. Various signal-processing algorithms are used for this purpose. The accuracy of these algorithms is inter alia restricted by the axial symmetry of the signals. However, in practice response signals are rather asymmetrical especially in case of measurement objects with critical surface structures such as edges or steep flanks. We present a novel signal-processing algorithm based on an exponential function with a cubic argument to handle asymmetrical and also symmetrical depth response signals. Results obtained by this algorithm are compared to those of commonly used signal processing algorithms. It turns out that the novel algorithm is more robust, more accurate and exhibits a repeatability of a similar order compared to other algorithms.
Research Highlights
- A novel, more robust algorithm with improved accuracy in peak extraction especially for asymmetrical response signals in confocal microscopy is introduced and validated.
- Improved accuracy is demonstrated for height and layer thickness measurements.
Research Highlights
- A novel, more robust algorithm with improved accuracy in peak extraction especially for asymmetrical response signals in confocal microscopy is introduced and validated.
- Improved accuracy is demonstrated for height and layer thickness measurements.
Zitierform
In: Microscopy Research & Technique Volume 86 / Issue 8 (2023-06-26) , S. 1012-1022 ; eissn:1097-0029Förderhinweis
Gefördert im Rahmen des Projekts DEALZitieren
@article{doi:10.17170/kobra-202308058578,
author={Hagemeier, Sebastian and Pahl, Tobias and Breidenbach, Johannes and Lehmann, Peter},
title={A novel cubic-exp evaluation algorithm considering non-symmetrical axial response signals of confocal microscopes},
journal={Microscopy Research & Technique},
year={2023}
}
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2023-09-04T08:17:19Z 2023-09-04T08:17:19Z 2023-06-26 doi:10.17170/kobra-202308058578 http://hdl.handle.net/123456789/15047 Gefördert im Rahmen des Projekts DEAL eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ asymmetrical signal confocal microscope evaluation algorithm layer thickness signal analysis 620 A novel cubic-exp evaluation algorithm considering non-symmetrical axial response signals of confocal microscopes Aufsatz The depth discrimination in confocal microscopy is based on the digital analysis of depth response signals obtained by each camera pixel during measurement. Various signal-processing algorithms are used for this purpose. The accuracy of these algorithms is inter alia restricted by the axial symmetry of the signals. However, in practice response signals are rather asymmetrical especially in case of measurement objects with critical surface structures such as edges or steep flanks. We present a novel signal-processing algorithm based on an exponential function with a cubic argument to handle asymmetrical and also symmetrical depth response signals. Results obtained by this algorithm are compared to those of commonly used signal processing algorithms. It turns out that the novel algorithm is more robust, more accurate and exhibits a repeatability of a similar order compared to other algorithms. Research Highlights - A novel, more robust algorithm with improved accuracy in peak extraction especially for asymmetrical response signals in confocal microscopy is introduced and validated. - Improved accuracy is demonstrated for height and layer thickness measurements. open access Hagemeier, Sebastian Pahl, Tobias Breidenbach, Johannes Lehmann, Peter doi:10.1002/jemt.24376 Konfokale Mikroskopie Algorithmus Schichtdicke Signalanalyse Signalverarbeitung publishedVersion eissn:1097-0029 Issue 8 Microscopy Research & Technique 1012-1022 Volume 86 false
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