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dc.date.accessioned2024-06-11T12:36:28Z
dc.date.available2024-06-11T12:36:28Z
dc.date.issued2024
dc.identifierdoi:10.17170/kobra-2024053110250
dc.identifier.urihttp://hdl.handle.net/123456789/15832
dc.descriptionZugleich: Dissertation, Universität Kassel, 2024
dc.language.isoeng
dc.publisherkassel university press
dc.rightsNamensnennung - Weitergabe unter gleichen Bedingungen 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-sa/4.0/*
dc.subjectElectrostatic MOEMS microelementeng
dc.subjectPull-in voltageeng
dc.subjectActuation timeeng
dc.subjectMaterial effecteng
dc.subjectCasimir effecteng
dc.subject.ddc620
dc.titleTheoretical Analyses and Simulations of Characteristics of MOEMS Microelement Arrays for Daylight Steeringeng
dc.typeBuch
dcterms.abstractThe integration of MOEMS microelement arrays into smart glass for light steering shows promising features and valuable advantages in terms of energy conservation, enhancing lighting conditions, and improving human comfort. This study explores various actuation solutions and concludes that electrostatically actuated MOEMS devices from INA offer rapid actuation speed, minimum energy consumption, long lifetime and high stability. The static and dynamic characteristics of MOEMS devices, encompassing stressgradient-based curling, electrostatic actuations, pull-in phenomena, vibrations, material impacts, and the intriguing Casimir effects in MOEMS, are significantly affected by many structural and material parameters. All these have been delved into by theoretical model calculations. Firstly, the curling of multi-layer is addressed using the proposed analytical methods of equivalences of bending stiffness and curling moment. Then, several solutions are selected to calculate the capacitance and pull-in voltage of rectangular microcantilevers incorporating fringe field effects. The analysis of electrostatic actuation on the planarized microelement involves integrating the equivalent moment of non-uniformly distributed electrostatic forces to estimate the pull-in voltage. Afterwards, the fundamentals of dynamic behaviours, such as the vibration and Eigenfrequency, are provided. The material effects on the characteristics of the MEMS devices are then analysed. In addition, theoretical modelling methods are employed to approximate the potential Casimir forces between paired microelements. These characteristics are also performed and verified by COMSOL 5.6 simulations, and many results agree with the results from analytic formula (including approximations). Several conclusions are briefly given here: (i) the curling axis is the most important parameter for curling, and it is mainly related to the sub-layer thicknesses; (ii) the pullin voltage of microelements is affected by the length, thickness and Young’s modulus, and for different geometries the degree of influence varies; (iii) the actuation time for microcantilevers is affected by the length, thickness, mass density and Young’s modulus in decreasing order of importance; (iv) the pull-in voltage and actuation time show opposite trends for the same parameter variations; (v) Al is the best metal for our electrostatic MOEMS; (vi) Casimir force is able to strongly attach two curled microelements. While this study provides already valuable insights into MOEMS microelement arrays, further refinement of theoretical methods and simulation models is essential to achieve better agreement with experimental observations.eng
dcterms.accessRightsopen access
dcterms.creatorYang, Xiaohui
dcterms.dateAccepted2024-01-30
dcterms.extentVII, 131 Seiten
dc.contributor.corporatenameKassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik
dc.contributor.refereeHillmer, Hartmut (Prof. Dr.)
dc.contributor.refereeLi, Qingdang (Prof. Dr.)
dc.publisher.placeKassel
dc.relation.isbn978-3-7376-1182-4
dc.subject.swdMikrosystemtechnikger
dc.subject.swdMEMSger
dc.subject.swdElektrische Spannungger
dc.subject.swdTageslichtger
dc.type.versionpublishedVersion
kup.iskuptrue
kup.price34,00
kup.subjectNaturwissenschaft, Technik, Informatik, Medizinger
kup.typDissertation
kup.institutionFB 16 Elektrotechnik / Informatik
kup.bindingSoftcover
kup.sizeDIN A5
ubks.epflichttrue


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Namensnennung - Weitergabe unter gleichen Bedingungen 4.0 International
Except where otherwise noted, this item's license is described as Namensnennung - Weitergabe unter gleichen Bedingungen 4.0 International