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Development, Evaluation and Optimization of Fabrication Processes for Daylight Guiding Systems Based on Micromirror Arrays
In this work, fabrication processes for daylight guiding systems based on micromirror arrays are developed, evaluated and optimized.Two different approaches are used: At first, nanoimprint lithography is used to fabricate large area micromirrors by means of Substrate Conformal Imprint Lithography (SCIL).Secondly,a new lithography technique is developed using a novel bi-layered photomask to fabricate large area micromirror arrays. The experimental results showing a reproducible stable process, high yield, and is ...
Optical Sensor Array based Nanospectrometer: Fabrication of high resolution 3D NanoImprint master templates and bonding of Fabry-Pérot filter array onto photodetector array
In the field of optical spectroscopy, spectrometers are high resolution optical sensors that have emerged as a platform for a wide range of application fields. Commercially available spectrometers are bulky and expensive. Hence, this limits its integration into modern mobile and wearable devices. To overcome this limitation, miniaturization of spectrometers is an interesting target for a wide range of emerging applications. The most attractive concept of fabricating miniaturized spectrometers is the Fabry-Pérot filter ...