Browsing Technische Physik - Halbleiterphysik, Nanostrukturierung & Analytik by Subject "Mikrosystemtechnik"
Now showing items 1-4 of 4
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DissertationElektrochemo- und mikromechanisches Verhalten elektronisch leitfähiger Polymere (2004-11-22)
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DissertationLithography-free micro- and nanostructuring based on conventional plasma etching (2005-02-02)
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DissertationPiezoresistive cantilevers with an integrated bimorph actuator (2004-07-26)
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DissertationProfile simulations of gas chopping etching processes : model development and comparison with experiments (2004-07-27)