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Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings
(2023-06-08)
Enhancing the lateral resolution in optical microscopy and interferometry is of great interest in recent research. In order to laterally resolve structures including feature dimensions below the Abbe resolution limit, microspheres in the optical near-field of the specimen are shown to locally improve the resolution of the imaging system. Experimental and simulated results following this approach are obtained by a high NA Linnik interferometer and analyzed in this contribution. They show the reconstructed surface of ...