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Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies
(2023-01-12)
Point-wise measuring profilometers like the tactile stylus instruments or optical sensors are established measurement tools in science and industry to measure and characterize surface textures. We present a fiber-coupled laser interferometric confocal distance sensor for surface profiling. The sensor is characterized by small geometric dimensions and by its high lateral
scanning speed. The ability to measure specularly reflecting and rough surface textures are demonstrated by performing several measurements on a ...