Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness

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dc.date.accessioned2023-03-27T11:32:42Z
dc.date.available2023-03-27T11:32:42Z
dc.date.issued2022-10-17
dc.description.sponsorshipGefördert im Rahmen des Projekts DEAL
dc.identifierdoi:10.17170/kobra-202303277707
dc.identifier.urihttp://hdl.handle.net/123456789/14534
dc.language.isoeng
dc.relation.doidoi:10.1002/pssa.202200465
dc.rightsNamensnennung-Nicht-kommerziell 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/*
dc.subjectetchingeng
dc.subjectmembraneseng
dc.subjectmicro-maskingeng
dc.subjectpolishing damageeng
dc.subjectroughness reductioneng
dc.subjectsingle-crystal diamondeng
dc.subject.ddc530
dc.subject.swdÄtzenger
dc.subject.swdMembranger
dc.subject.swdRauigkeitger
dc.titleFabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughnesseng
dc.typeAufsatz
dc.type.versionpublishedVersion
dcterms.abstractCertain aspects before and during the fabrication of single-crystal diamond (SCD) membranes are highlighted, which are decisive to obtain high-quality membranes with low surface roughness values around 0.2 nm on a small area scale. In addition to the requirements for the starting material, including a high planarity and a moderate surface roughness, the importance of cleaning processes to minimize particles and impurities before and during the structuring is emphasized. With the help of a planarization procedure, consisting of a combination of different Ar/Cl₂ recipes with low etch rates, surface defects like grooves due to polishing are minimized and smooth surfaces are acquired. Severe micro-masking can be prevented by the application of a cyclic Ar/Cl₂ + O₂ recipe, allowing finally the fabrication of defect-minimized and planarized SCD membranes in the thickness range between a few microns and a few hundred nanometers. The high quality of the structured SCD membranes is evidenced with a morphological as well as optical characterization via fiber-based microcavity measurements.eng
dcterms.accessRightsopen access
dcterms.creatorHeupel, Julia
dcterms.creatorPallmann, Maximilian
dcterms.creatorKörber, Jonathan
dcterms.creatorHunger, David
dcterms.creatorReithmaier, Johann Peter
dcterms.creatorPopov, Cyril
dcterms.extent8 Seiten
dcterms.source.identifiereissn:1862-6319
dcterms.source.issueIssue 4
dcterms.source.journalPhysica status solidi : A, Applied researcheng
dcterms.source.volumeVolume 220
kup.iskupfalse

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