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Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces

Amirzada, Muhammad Rizwan
Li, Qingdang
Hillmer, Hartmut

This research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.

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Gefördert im Rahmen des Projekts DEAL
Citation
In: Optical and Quantum Electronics Volume 53 / Issue 5 (2021-04-18) , S. ; eissn:1572-817X
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Namensnennung 4.0 International
Except where otherwised noted, this item's license is described as Namensnennung 4.0 International
@article{doi:10.17170/kobra-202104273752,
  author    ={Amirzada, Muhammad Rizwan and Li, Qingdang and Hillmer, Hartmut},
  title    ={Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces},
  keywords ={530 and MEMS and Mikrooptik and Spiegelsystem and Substrat  and Thermoplast},
  copyright  ={http://creativecommons.org/licenses/by/4.0/},
  language ={en},
  journal  ={Optical and Quantum Electronics},
  year   ={2021-04-18}
}