MEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range

2012-04-232012-04-232012-04-23urn:nbn:de:hebis:34-2012042341117http://hdl.handle.net/123456789/2012042341117engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/spectrometertunable optical filterFabry-Pérot filterMEMS technologyDry etching620MEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral RangeDissertationSpektrometerMEMS