Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics

2018-08-222018-08-222016-04-052334-2536urn:nbn:de:hebis:34-2018082256293http://hdl.handle.net/123456789/2018082256293engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/Nanostructure fabricationLaser materials processingPulse shapingMultiphoton processess530Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectricsAufsatz