2009-01-212009-01-212009-01-21urn:nbn:de:hebis:34-2009012125854http://hdl.handle.net/123456789/20090121258544570037 bytesapplication/pdfengUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/chemical gas sensormicrocantileverpiezoresistive readoutphase-shift detectionsorptioncalixarene620Chemical gas sensors based on functionalized self-actuated piezo-resistive cantileversDissertation68.43.-h85.85.+jGassensorKantilever