Technological implementation and characterization of optimized high quality multi-stopband Fabry-Pérot filter arrays for nanospectrometers using Substrate Conformal Imprint Lithography

2018-08-292018-08-292018-08-29urn:nbn:de:hebis:34-2018082956352http://hdl.handle.net/123456789/2018082956352engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/optical spectroscopyMulti-stopband optical filter array3D NanoimprintSubstrate Conformal Imprint Lithographyminiaturized spectrometer620Technological implementation and characterization of optimized high quality multi-stopband Fabry-Pérot filter arrays for nanospectrometers using Substrate Conformal Imprint LithographyDissertationFabry-Pérot-ResonatorOptisches FilterOptische SpektroskopieArrayNanoprägen