Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies

2023-05-192023-05-192023-01-12http://hdl.handle.net/123456789/14725engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/high-speed sensorinterferometric confocal distance sensoroptical profilometerminiaturized point sensorfiber coupled sensorroughness measurementfiber optics600530Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequenciesAufsatzInterferometrieRauigkeitsmessungFaseroptik