2023-02-202023-02-202023-01-13http://hdl.handle.net/123456789/14428engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/MEMS cantileverpull-in voltageactuation speednon-linearitydynamicsmetallic material systems620660Study of Dynamics in Metallic MEMS Cantilevers - Pull-In Voltage and Actuation SpeedAufsatzMEMSElektrische SpannungGeschwindigkeitNichtlineares PhänomenDynamikMetallischer Werkstoff