2021-02-112021-02-112021-01-11http://hdl.handle.net/123456789/12496engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/nanoimprintphotonic nanomaterialsoptical spectrometersinterferometersFabry– Pérot filtersdetector arraystunable MEMSlinewidthminiaturization530Role of Nanoimprint Lithography for Strongly Miniaturized Optical SpectrometersAufsatzOptische SpektroskopieSpektrometerNanophotonikLithografieLinienbreite