2006-03-022006-03-022006-03-02urn:nbn:de:hebis:34-200603027086http://hdl.handle.net/123456789/20060302708612967703 bytesapplication/pdfengUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/optical filterOptisches FiltermicromachiningFabry-Perot filterair-gap filterMEMS620Dissertation07.57.Ty Infrared spectrometers, auxiliary equipment, and techniques07.60.Ly Interferometers42.79.Ci Filters, zone plates, and polarizers78.20.Bh Theory, models, and numerical simulation78.67.Pt Multilayers; superlattices85.60.Bt Optoelectronic device characterization, design, and modeling85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devicesElektrooptisches BauelementFabry-Perot-ResonatorBragg-ReflektorVertikalresonatorLuftspaltAbstimmung <Frequenz>