Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

2015-01-072015-01-072015-01-07urn:nbn:de:hebis:34-2015010747030http://hdl.handle.net/123456789/2015010747030engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/SpectroscopyTunable optical filterFabry PérotMEMSSputter depositionNiobium pentoxideSilicon dioxideResidual stress620Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral RangeDissertationSpektroskopieSensor-ArrayOptisches FilterNiobpentoxidSiliciumdioxid