2020-01-172020-01-172019-11-06http://hdl.handle.net/123456789/11426engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/phospholesreverse nanoimprint lithographyfluorescencesiliconsolid-state structures540Tailoring Phospholes for Imprint of Fluorescent 3D StructuresAufsatz