2022-01-032022-01-032021-10-15http://hdl.handle.net/123456789/13476engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/coherence scanning interferometryin-process applicationMirau interferometervibration compensationinterferometric distance sensoroptical path length modulationoscillating reference mirror600Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process ApplicationsAufsatzInterferometrieOptische MessungOberflächenmessungInterferometerSensorOptische Weglänge