2023-01-022023-01-022022-08-20http://hdl.handle.net/123456789/14315engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/600A novel approach to construct self-assembled 3D MEMS arraysAufsatzMEMSArray3D-TechnologieHohlzylinder