Optimization in the Technological Steps for the Fabrication of Large Area Micromirror Arrays

2015-02-232015-02-232015-02-23urn:nbn:de:hebis:34-2015022347468http://hdl.handle.net/123456789/2015022347468engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/Surface RoughnessStylus ProfilometryAtomic Force Microscopy620Optimization in the Technological Steps for the Fabrication of Large Area Micromirror ArraysDissertationMEMSRauigkeitRasterkraftmikroskopie