Lateral resolution enhanced interference microscopy using virtual annular apertures

2023-05-192023-05-192023-01-27http://hdl.handle.net/123456789/14727engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/interference microscopycoherence scanning interferometrythree-dimensional transfer functionlateral resolutionFourier opticsKirchhoff approximation530Lateral resolution enhanced interference microscopy using virtual annular aperturesAufsatzInterferenzmikroskopieÜbertragungsfunktionFourier-Optik