2017-08-232017-08-232017-08-23urn:nbn:de:hebis:34-2017082353310http://hdl.handle.net/123456789/2017082353310engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/NanoimprintResidual Layer620Residual-Layer-Free 3D Nanoimprinting using Novel Hybrid Soft TemplatesDissertationNanoprägen