2024-05-272024-05-272024http://hdl.handle.net/123456789/15782engAttribution-NoDerivatives 4.0 Internationalhttp://creativecommons.org/licenses/by-nd/4.0/Abstimmbare Optische FilterMiniaturisierungMEMS620Design and Implementation of Novel Optical Fabry-PĂ©rot Arrays for Medical ApplicationsDissertationMiniaturisierungMEMSOptisches Filter