2016-06-092016-06-092016-06-09urn:nbn:de:hebis:34-2016060950380http://hdl.handle.net/123456789/2016060950380engUrheberrechtlich geschützthttps://rightsstatements.org/page/InC/1.0/optische Spektroskopieoptische Filter ArraysFabry-Pérot Filter3D NanoimprintSubstrate Conformal Imprint LithographyResidual LayerPolymerisationsschrumpfungoptical spectroscopyoptical filter arraysFabry-Perot filter3D nanoimprintsubstrate conformal imprint lithographyresidual layerpolymerization shrinkage620Fabrication and Characterization of Efficient Optical Filter Arrays Implemented by 3D NanoimprintDissertationOptische Spektroskopie