Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces

2021-05-112021-05-112021-04-18http://hdl.handle.net/123456789/12816engNamensnennung 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/optical MEMSmicromirrosflexible substratepolyethylene naphthalate530Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfacesAufsatzMEMSMikrooptikSpiegelsystemSubstrat <Mikroelektronik>Thermoplast