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Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces

dc.date.accessioned2021-05-11T11:24:14Z
dc.date.available2021-05-11T11:24:14Z
dc.date.issued2021-04-18
dc.identifierdoi:10.17170/kobra-202104273752
dc.identifier.urihttp://hdl.handle.net/123456789/12816
dc.description.sponsorshipGefördert im Rahmen des Projekts DEALger
dc.language.isoengeng
dc.rightsNamensnennung 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.subjectoptical MEMSeng
dc.subjectmicromirroseng
dc.subjectflexible substrateeng
dc.subjectpolyethylene naphthalateeng
dc.subject.ddc530
dc.titleDevelopment of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaceseng
dc.typeAufsatz
dcterms.abstractThis research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.eng
dcterms.accessRightsopen access
dcterms.creatorAmirzada, Muhammad Rizwan
dcterms.creatorLi, Qingdang
dcterms.creatorHillmer, Hartmut
dc.relation.doidoi:10.1007/s11082-021-02846-7
dc.subject.swdMEMSger
dc.subject.swdMikrooptikger
dc.subject.swdSpiegelsystemger
dc.subject.swdSubstrat <Mikroelektronik>ger
dc.subject.swdThermoplastger
dc.type.versionpublishedVersion
dcterms.source.identifiereissn:1572-817X
dcterms.source.issueIssue 5
dcterms.source.journalOptical and Quantum Electronicseng
dcterms.source.volumeVolume 53
kup.iskupfalse
dcterms.source.articlenumber210


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