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Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications

dc.date.accessioned2022-01-03T13:49:40Z
dc.date.available2022-01-03T13:49:40Z
dc.date.issued2021-10-15
dc.identifierdoi:10.17170/kobra-202112215301
dc.identifier.urihttp://hdl.handle.net/123456789/13476
dc.description.sponsorshipGefördert durch den Publikationsfonds der Universität Kasselger
dc.language.isoengeng
dc.rightsNamensnennung 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.subjectcoherence scanning interferometryger
dc.subjectin-process applicationeng
dc.subjectMirau interferometereng
dc.subjectvibration compensationeng
dc.subjectinterferometric distance sensoreng
dc.subjectoptical path length modulationeng
dc.subjectoscillating reference mirroreng
dc.subject.ddc600
dc.titleMirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applicationseng
dc.typeAufsatz
dcterms.abstractWe present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning process with high temporal resolution. The additional information acquired by the IDS is used to correct the CSI data disturbed by unwanted distance changes due to environmental vibrations subsequent to the measurement. Due to the fixed reference mirror in commercial Mirau objectives, a Mirau attachment (MA) comprising an oscillating reference mirror is designed and built. Compared to our previous systems based on the Michelson and the Linnik interferometer, the MA represents a novel solution that completes the range of possible applications. Due to its advantages, the Mirau setup is the preferred and most frequently used interferometer type in industry. Therefore, the industrial use is ensured by this development. We investigate the functioning of the system and the capability of the vibration compensation by several measurements on various surface topographies.eng
dcterms.accessRightsopen access
dcterms.creatorSerbes, Hüseyin
dcterms.creatorGollor, Pascal
dcterms.creatorHagemeier, Sebastian
dcterms.creatorLehmann, Peter
dc.relation.doidoi:10.3390/app11209642
dc.subject.swdInterferometrieger
dc.subject.swdOptische Messungger
dc.subject.swdOberflächenmessungger
dc.subject.swdInterferometerger
dc.subject.swdSensorger
dc.subject.swdOptische Weglängeger
dc.type.versionpublishedVersion
dcterms.source.identifiereissn:2076-3417
dcterms.source.issueIssue 20
dcterms.source.journalApplied Scienceeng
dcterms.source.volumeVolume 11
kup.iskupfalse
dcterms.source.articlenumber9642


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