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2022-08-20Author
Akhundzada, SapidaYang, XiaohuiFiedler, JohannesKäkel, EireenAl-Qargholi, BasimBuhmann, StefanEhresmann, ArnoHillmer, HartmutMetadata
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A novel approach to construct self-assembled 3D MEMS arrays
Abstract
The paper presents the design and technological fabrication process of Yin or Yang-shaped, micron-sized electromechanical system (MEMS) elements displaying asymmetric hollow cylinders with two different curvatures of the cylinder shell. By adapting the process steps, two neighboring shutter MEMS elements can either be attached to each other to create asymmetric hollow cylinders or remain disconnected to form curled cylindrical or ellipsoidal tubes or tube fractions. A novel 3D self-organization process has been developed to connect two neighboring shutter elements, exploiting surface tension forces via a sequential drying process. The process conditions have been analyzed and optimized to fabricate the two different geometries of the MEMS elements. The resulting MEMS system elements were characterized by focused ion beam and scanning electron microscopy. The contribution of Casimir force, van der Waals force, and other physical interfacial forces are discussed in the formation of the asymmetric hollow cylinders.
Citation
In: Microsystem Technologies Volume 28 / Issue 9 (2022-08-20) , S. 2139-2146 ; eissn:1432-1858Sponsorship
Gefördert im Rahmen des Projekts DEALCitation
@article{doi:10.17170/kobra-202209226890,
author={Akhundzada, Sapida and Yang, Xiaohui and Fiedler, Johannes and Käkel, Eireen and Al-Qargholi, Basim and Buhmann, Stefan and Ehresmann, Arno and Hillmer, Hartmut},
title={A novel approach to construct self-assembled 3D MEMS arrays},
journal={Microsystem Technologies},
year={2022}
}
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2023-01-02T10:52:41Z 2023-01-02T10:52:41Z 2022-08-20 doi:10.17170/kobra-202209226890 http://hdl.handle.net/123456789/14315 Gefördert im Rahmen des Projekts DEAL eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ 600 A novel approach to construct self-assembled 3D MEMS arrays Aufsatz The paper presents the design and technological fabrication process of Yin or Yang-shaped, micron-sized electromechanical system (MEMS) elements displaying asymmetric hollow cylinders with two different curvatures of the cylinder shell. By adapting the process steps, two neighboring shutter MEMS elements can either be attached to each other to create asymmetric hollow cylinders or remain disconnected to form curled cylindrical or ellipsoidal tubes or tube fractions. A novel 3D self-organization process has been developed to connect two neighboring shutter elements, exploiting surface tension forces via a sequential drying process. The process conditions have been analyzed and optimized to fabricate the two different geometries of the MEMS elements. The resulting MEMS system elements were characterized by focused ion beam and scanning electron microscopy. The contribution of Casimir force, van der Waals force, and other physical interfacial forces are discussed in the formation of the asymmetric hollow cylinders. open access Akhundzada, Sapida Yang, Xiaohui Fiedler, Johannes Käkel, Eireen Al-Qargholi, Basim Buhmann, Stefan Ehresmann, Arno Hillmer, Hartmut doi:10.1007/s00542-022-05361-1 MEMS Array 3D-Technologie Hohlzylinder publishedVersion eissn:1432-1858 Issue 9 Microsystem Technologies 2139-2146 Volume 28 false
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