Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness
| dc.date.accessioned | 2023-03-27T11:32:42Z | |
| dc.date.available | 2023-03-27T11:32:42Z | |
| dc.date.issued | 2022-10-17 | |
| dc.identifier | doi:10.17170/kobra-202303277707 | |
| dc.identifier.uri | http://hdl.handle.net/123456789/14534 | |
| dc.description.sponsorship | Gefördert im Rahmen des Projekts DEAL | |
| dc.language.iso | eng | |
| dc.rights | Namensnennung-Nicht-kommerziell 4.0 International | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc/4.0/ | * |
| dc.subject | etching | eng |
| dc.subject | membranes | eng |
| dc.subject | micro-masking | eng |
| dc.subject | polishing damage | eng |
| dc.subject | roughness reduction | eng |
| dc.subject | single-crystal diamond | eng |
| dc.subject.ddc | 530 | |
| dc.title | Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness | eng |
| dc.type | Aufsatz | |
| dcterms.abstract | Certain aspects before and during the fabrication of single-crystal diamond (SCD) membranes are highlighted, which are decisive to obtain high-quality membranes with low surface roughness values around 0.2 nm on a small area scale. In addition to the requirements for the starting material, including a high planarity and a moderate surface roughness, the importance of cleaning processes to minimize particles and impurities before and during the structuring is emphasized. With the help of a planarization procedure, consisting of a combination of different Ar/Cl₂ recipes with low etch rates, surface defects like grooves due to polishing are minimized and smooth surfaces are acquired. Severe micro-masking can be prevented by the application of a cyclic Ar/Cl₂ + O₂ recipe, allowing finally the fabrication of defect-minimized and planarized SCD membranes in the thickness range between a few microns and a few hundred nanometers. The high quality of the structured SCD membranes is evidenced with a morphological as well as optical characterization via fiber-based microcavity measurements. | eng |
| dcterms.accessRights | open access | |
| dcterms.creator | Heupel, Julia | |
| dcterms.creator | Pallmann, Maximilian | |
| dcterms.creator | Körber, Jonathan | |
| dcterms.creator | Hunger, David | |
| dcterms.creator | Reithmaier, Johann Peter | |
| dcterms.creator | Popov, Cyril | |
| dcterms.extent | 8 Seiten | |
| dc.relation.doi | doi:10.1002/pssa.202200465 | |
| dc.subject.swd | Ätzen | ger |
| dc.subject.swd | Membran | ger |
| dc.subject.swd | Rauigkeit | ger |
| dc.type.version | publishedVersion | |
| dcterms.source.identifier | eissn:1862-6319 | |
| dcterms.source.issue | Issue 4 | |
| dcterms.source.journal | Physica status solidi : A, Applied research | eng |
| dcterms.source.volume | Volume 220 | |
| kup.iskup | false |
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