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Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings
Zusammenfassung
Enhancing the lateral resolution in optical microscopy and interferometry is of great interest in recent research. In order to laterally resolve structures including feature dimensions below the Abbe resolution limit, microspheres in the optical near-field of the specimen are shown to locally improve the resolution of the imaging system. Experimental and simulated results following this approach are obtained by a high NA Linnik interferometer and analyzed in this contribution. They show the reconstructed surface of a 1D phase grating below the resolution limit. For further understanding of the transfer characteristics, measured interference data are compared with FEM (finite element method) based simulations with respect to the polarization dependency of the relevant image information for 1D phase gratings. Therefore, the implemented Koehler illumination as well as the experimental setup utilize polarized light.
Zitierform
In: Journal of the European Optical Society / Rapid Publications Volume 19 / Number 1 (2023-06-08) eissn:1990-2573Förderhinweis
Gefördert durch den Publikationsfonds der Universität KasselZitieren
@article{doi:10.17170/kobra-202306278299,
author={Hüser, Lucie and Pahl, Tobias and Lehmann, Peter},
title={Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings},
journal={Journal of the European Optical Society / Rapid Publications},
year={2023}
}
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2023-06-30T06:21:15Z 2023-06-30T06:21:15Z 2023-06-08 doi:10.17170/kobra-202306278299 http://hdl.handle.net/123456789/14860 Gefördert durch den Publikationsfonds der Universität Kassel eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ Interferometry Microsphere Resolution CSI Polarization. 004 600 Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings Aufsatz Enhancing the lateral resolution in optical microscopy and interferometry is of great interest in recent research. In order to laterally resolve structures including feature dimensions below the Abbe resolution limit, microspheres in the optical near-field of the specimen are shown to locally improve the resolution of the imaging system. Experimental and simulated results following this approach are obtained by a high NA Linnik interferometer and analyzed in this contribution. They show the reconstructed surface of a 1D phase grating below the resolution limit. For further understanding of the transfer characteristics, measured interference data are compared with FEM (finite element method) based simulations with respect to the polarization dependency of the relevant image information for 1D phase gratings. Therefore, the implemented Koehler illumination as well as the experimental setup utilize polarized light. open access Hüser, Lucie Pahl, Tobias Lehmann, Peter doi:10.1051/jeos/2023029 Mikroskopie Interferometrie Mikrosphäre Polarisation publishedVersion eissn:1990-2573 Number 1 Journal of the European Optical Society / Rapid Publications Volume 19 false Article Number 32
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