Aufsatz
Spectral composition of low-coherence interferograms at high numerical apertures
Abstract
Interference signals in coherence scanning interferometry at high numerical apertures and narrow bandwidth illumination are spectrally broadened. This enables phase analysis within a spectral range much wider than the spectral distribution of the light emitted by the light source. Consequently, different surface features can be resolved depending on the wavelength used for phase analysis of the interference signals.
In addition, the surface topography itself affects the spectral composition of interference signals in different ways. Signals related to tilted surfaces or step height structures show special spectral characteristics. Thus, spectral amplitude and phase analysis enables a better understanding of the underlying physical mechanisms and gives hints how to improve the measurement accuracy.
In addition, the surface topography itself affects the spectral composition of interference signals in different ways. Signals related to tilted surfaces or step height structures show special spectral characteristics. Thus, spectral amplitude and phase analysis enables a better understanding of the underlying physical mechanisms and gives hints how to improve the measurement accuracy.
Citation
In: Journal of the European Optical Society - Rapid Publications 15 (2019-04-11) , S. 5 ; ISSN: 1990-2573Sponsorship
Gefördert durch den Publikationsfonds der Universität KasselCitation
@article{doi:10.17170/kobra-20190521509,
author={Lehmann, Peter and Tereschenko, Stanislav and Allendorf, Benedikt and Hagemeier, Sebastian and Hüser, Lucie},
title={Spectral composition of low-coherence interferograms at high numerical apertures},
journal={Journal of the European Optical Society - Rapid Publications},
year={2019}
}
0500 Oax 0501 Text $btxt$2rdacontent 0502 Computermedien $bc$2rdacarrier 1100 2019$n2019 1500 1/eng 2050 ##0##http://hdl.handle.net/123456789/11250 3000 Lehmann, Peter 3010 Tereschenko, Stanislav 3010 Allendorf, Benedikt 3010 Hagemeier, Sebastian 3010 Hüser, Lucie 4000 Spectral composition of low-coherence interferograms at high numerical apertures / Lehmann, Peter 4030 4060 Online-Ressource 4085 ##0##=u http://nbn-resolving.de/http://hdl.handle.net/123456789/11250=x R 4204 \$dAufsatz 4170 7136 ##0##http://hdl.handle.net/123456789/11250
2019-05-22T06:18:27Z 2019-05-22T06:18:27Z 2019-04-11 doi:10.17170/kobra-20190521509 http://hdl.handle.net/123456789/11250 Gefördert durch den Publikationsfonds der Universität Kassel eng Urheberrechtlich geschützt https://rightsstatements.org/page/InC/1.0/ Coherence scanning interferometry Numerical aperture Interference microscopy Spectral analysis Lateral resolution 004 Spectral composition of low-coherence interferograms at high numerical apertures Aufsatz Interference signals in coherence scanning interferometry at high numerical apertures and narrow bandwidth illumination are spectrally broadened. This enables phase analysis within a spectral range much wider than the spectral distribution of the light emitted by the light source. Consequently, different surface features can be resolved depending on the wavelength used for phase analysis of the interference signals. In addition, the surface topography itself affects the spectral composition of interference signals in different ways. Signals related to tilted surfaces or step height structures show special spectral characteristics. Thus, spectral amplitude and phase analysis enables a better understanding of the underlying physical mechanisms and gives hints how to improve the measurement accuracy. open access Lehmann, Peter Tereschenko, Stanislav Allendorf, Benedikt Hagemeier, Sebastian Hüser, Lucie doi:10.1186/s41476-019-0101-8 publishedVersion ISSN: 1990-2573 Journal of the European Optical Society - Rapid Publications 5 15
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