Datum
2021-06-07Metadata
Zur Langanzeige
Aufsatz
Rigorous 3D modeling of confocal microscopy on 2D surface topographies
Zusammenfassung
Although optical 3D topography measurement instruments are widespread, measured profiles suffer from systematic deviations occurring due to the wave characteristics of light. These deviations can be analyzed by numerical simulations. We present a 3D modeling of the image formation of confocal microscopes. For this, the light-surface interaction is simulated using two different rigorous methods, the finite element method and the rigorous coupled-wave analysis. The image formation in the confocal microscope is simulated using a Fourier optics approach. The model provides high accuracy and advantages with respect to the computational effort as a full 3D model is applied to 2D structures and the lateral scanning process of the confocal microscope is considered without repeating the time consuming rigorous simulation of the scattering process. The accuracy of the model is proved considering different deterministic surface structures, which usually cause strong systematic deviations in measurement results. Further, the influences of apodization and a finite pinhole size are demonstrated.
Zitierform
In: Measurement Science and Technology Volume 32 / Number 9 (2021-06-07) eissn:1361-6501Förderhinweis
Gefördert im Rahmen eines Open-Access-Transformationsvertrags mit dem VerlagZitieren
@article{doi:10.17170/kobra-202107264411,
author={Pahl, Tobias and Hagemeier, Sebastian and Bischoff, Jörg and Manske, Eberhard and Lehmann, Peter},
title={Rigorous 3D modeling of confocal microscopy on 2D surface topographies},
journal={Measurement Science and Technology},
year={2021}
}
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2021-09-13T10:34:55Z 2021-09-13T10:34:55Z 2021-06-07 doi:10.17170/kobra-202107264411 http://hdl.handle.net/123456789/13238 Gefördert im Rahmen eines Open-Access-Transformationsvertrags mit dem Verlag eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ confocal microscopy modeling rigorous simulation 600 Rigorous 3D modeling of confocal microscopy on 2D surface topographies Aufsatz Although optical 3D topography measurement instruments are widespread, measured profiles suffer from systematic deviations occurring due to the wave characteristics of light. These deviations can be analyzed by numerical simulations. We present a 3D modeling of the image formation of confocal microscopes. For this, the light-surface interaction is simulated using two different rigorous methods, the finite element method and the rigorous coupled-wave analysis. The image formation in the confocal microscope is simulated using a Fourier optics approach. The model provides high accuracy and advantages with respect to the computational effort as a full 3D model is applied to 2D structures and the lateral scanning process of the confocal microscope is considered without repeating the time consuming rigorous simulation of the scattering process. The accuracy of the model is proved considering different deterministic surface structures, which usually cause strong systematic deviations in measurement results. Further, the influences of apodization and a finite pinhole size are demonstrated. open access Pahl, Tobias Hagemeier, Sebastian Bischoff, Jörg Manske, Eberhard Lehmann, Peter doi:10.1088/1361-6501/abfd69 Konfokale Mikroskopie Modellierung Simulation Topografie publishedVersion eissn:1361-6501 Number 9 Measurement Science and Technology Volume 32 false 094010
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