View/ Open
Date
2021-10-15Subject
600 Technology InterferometrieOptische MessungOberflächenmessungInterferometerSensorOptische WeglängeMetadata
Show full item record
Aufsatz
Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications
Abstract
We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning process with high temporal resolution. The additional information acquired by the IDS is used to correct the CSI data disturbed by unwanted distance changes due to environmental vibrations subsequent to the measurement. Due to the fixed reference mirror in commercial Mirau objectives, a Mirau attachment (MA) comprising an oscillating reference mirror is designed and built. Compared to our previous systems based on the Michelson and the Linnik interferometer, the MA represents a novel solution that completes the range of possible applications. Due to its advantages, the Mirau setup is the preferred and most frequently used interferometer type in industry. Therefore, the industrial use is ensured by this development. We investigate the functioning of the system and the capability of the vibration compensation by several measurements on various surface topographies.
Citation
In: Applied Science Volume 11 / Issue 20 (2021-10-15) eissn:2076-3417Sponsorship
Gefördert durch den Publikationsfonds der Universität KasselCitation
@article{doi:10.17170/kobra-202112215301,
author={Serbes, Hüseyin and Gollor, Pascal and Hagemeier, Sebastian and Lehmann, Peter},
title={Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications},
journal={Applied Science},
year={2021}
}
0500 Oax 0501 Text $btxt$2rdacontent 0502 Computermedien $bc$2rdacarrier 1100 2021$n2021 1500 1/eng 2050 ##0##http://hdl.handle.net/123456789/13476 3000 Serbes, Hüseyin 3010 Gollor, Pascal 3010 Hagemeier, Sebastian 3010 Lehmann, Peter 4000 Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications / Serbes, Hüseyin 4030 4060 Online-Ressource 4085 ##0##=u http://nbn-resolving.de/http://hdl.handle.net/123456789/13476=x R 4204 \$dAufsatz 4170 5550 {{Interferometrie}} 5550 {{Optische Messung}} 5550 {{Oberflächenmessung}} 5550 {{Interferometer}} 5550 {{Sensor}} 5550 {{Optische Weglänge}} 7136 ##0##http://hdl.handle.net/123456789/13476
2022-01-03T13:49:40Z 2022-01-03T13:49:40Z 2021-10-15 doi:10.17170/kobra-202112215301 http://hdl.handle.net/123456789/13476 Gefördert durch den Publikationsfonds der Universität Kassel eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ coherence scanning interferometry in-process application Mirau interferometer vibration compensation interferometric distance sensor optical path length modulation oscillating reference mirror 600 Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications Aufsatz We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning process with high temporal resolution. The additional information acquired by the IDS is used to correct the CSI data disturbed by unwanted distance changes due to environmental vibrations subsequent to the measurement. Due to the fixed reference mirror in commercial Mirau objectives, a Mirau attachment (MA) comprising an oscillating reference mirror is designed and built. Compared to our previous systems based on the Michelson and the Linnik interferometer, the MA represents a novel solution that completes the range of possible applications. Due to its advantages, the Mirau setup is the preferred and most frequently used interferometer type in industry. Therefore, the industrial use is ensured by this development. We investigate the functioning of the system and the capability of the vibration compensation by several measurements on various surface topographies. open access Serbes, Hüseyin Gollor, Pascal Hagemeier, Sebastian Lehmann, Peter doi:10.3390/app11209642 Interferometrie Optische Messung Oberflächenmessung Interferometer Sensor Optische Weglänge publishedVersion eissn:2076-3417 Issue 20 Applied Science Volume 11 false 9642
The following license files are associated with this item: