Date
2022-10-17Author
Heupel, JuliaPallmann, MaximilianKörber, JonathanHunger, DavidReithmaier, Johann PeterPopov, CyrilMetadata
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Aufsatz
Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness
Abstract
Certain aspects before and during the fabrication of single-crystal diamond (SCD) membranes are highlighted, which are decisive to obtain high-quality membranes with low surface roughness values around 0.2 nm on a small area scale. In addition to the requirements for the starting material, including a high planarity and a moderate surface roughness, the importance of cleaning processes to minimize particles and impurities before and during the structuring is emphasized. With the help of a planarization procedure, consisting of a combination of different Ar/Cl₂ recipes with low etch rates, surface defects like grooves due to polishing are minimized and smooth surfaces are acquired. Severe micro-masking can be prevented by the application of a cyclic Ar/Cl₂ + O₂ recipe, allowing finally the fabrication of defect-minimized and planarized SCD membranes in the thickness range between a few microns and a few hundred nanometers. The high quality of the structured SCD membranes is evidenced with a morphological as well as optical characterization via fiber-based microcavity measurements.
Citation
In: Physica status solidi : A, Applied research Volume 220 / Issue 4 (2022-10-17) eissn:1862-6319Sponsorship
Gefördert im Rahmen des Projekts DEALCitation
@article{doi:10.17170/kobra-202303277707,
author={Heupel, Julia and Pallmann, Maximilian and Körber, Jonathan and Hunger, David and Reithmaier, Johann Peter and Popov, Cyril},
title={Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness},
journal={Physica status solidi : A, Applied research},
year={2022}
}
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2023-03-27T11:32:42Z 2023-03-27T11:32:42Z 2022-10-17 doi:10.17170/kobra-202303277707 http://hdl.handle.net/123456789/14534 Gefördert im Rahmen des Projekts DEAL eng Namensnennung-Nicht-kommerziell 4.0 International http://creativecommons.org/licenses/by-nc/4.0/ etching membranes micro-masking polishing damage roughness reduction single-crystal diamond 530 Fabrication of High-Quality Thin Single-Crystal Diamond Membranes with Low Surface Roughness Aufsatz Certain aspects before and during the fabrication of single-crystal diamond (SCD) membranes are highlighted, which are decisive to obtain high-quality membranes with low surface roughness values around 0.2 nm on a small area scale. In addition to the requirements for the starting material, including a high planarity and a moderate surface roughness, the importance of cleaning processes to minimize particles and impurities before and during the structuring is emphasized. With the help of a planarization procedure, consisting of a combination of different Ar/Cl₂ recipes with low etch rates, surface defects like grooves due to polishing are minimized and smooth surfaces are acquired. Severe micro-masking can be prevented by the application of a cyclic Ar/Cl₂ + O₂ recipe, allowing finally the fabrication of defect-minimized and planarized SCD membranes in the thickness range between a few microns and a few hundred nanometers. The high quality of the structured SCD membranes is evidenced with a morphological as well as optical characterization via fiber-based microcavity measurements. open access Heupel, Julia Pallmann, Maximilian Körber, Jonathan Hunger, David Reithmaier, Johann Peter Popov, Cyril 8 Seiten doi:10.1002/pssa.202200465 Ätzen Membran Rauigkeit publishedVersion eissn:1862-6319 Issue 4 Physica status solidi : A, Applied research Volume 220 false
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