Datum
2017Autor
Worapattrakul, NatalieSchlagwort
620 Ingenieurwissenschaften 690 Hausbau, Bauhandwerk MEMSMikrooptikSpiegelMikrofertigungNanoprägenPlanartechnikTageslichtsystemSpiegelsystemMikroaktorMetadata
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Buch
Micromirrors for Daylight Steering Applications
Micromirrors for Daylight Steering Applications
Planarization of Micromirror Planes by Sub-Structure Implementation and Process Transfer to Nanoimprint Fabrication Technology
Zusammenfassung
In this research work electrostatically actuatable micromirrors for daylight steering applications were developed and fabricated. To improve the light steering capability of these mirrors by reflection and to gain maximum transmission of light in the non-actuated state, the mirror plane area was planarized by a newly developed method. In this case, so-called sub-structures were introduced in the mirror layer to stabilize it mechanically, comparable to corrugated structures on macroscopic scale. For the fabrication of these micromirrors a novel process based on nanoimprint lithography (NIL) was developed. Since NIL provides rapid, economical production and fabrication on a large scale, this process will allow the future transfer to an industrial fabrication, and thus ensure commercial availability at a reasonable price for the final daylighting system based on micromirrors.
Zusätzliche Informationen
Zugleich: Dissertation, Universität Kassel, 2016Förderhinweis
German Federal Environmental FoundationZitieren
@book{doi:10.19211/KUP9783737602792,
urn:nbn:de:0002-402794,
author={Worapattrakul, Natalie},
title={Micromirrors for Daylight Steering Applications},
publisher={kassel university press},
year={2017}
}
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2023-05-22T12:23:36Z 2023-05-22T12:23:36Z 2017 doi:10.19211/KUP9783737602792 978-3-7376-0279-2 (e-book) urn:nbn:de:0002-402794 http://hdl.handle.net/123456789/14733 Zugleich: Dissertation, Universität Kassel, 2016 German Federal Environmental Foundation eng kassel university press Urheberrechtlich geschützt https://rightsstatements.org/page/InC/1.0/ 620 690 Micromirrors for Daylight Steering Applications Buch In this research work electrostatically actuatable micromirrors for daylight steering applications were developed and fabricated. To improve the light steering capability of these mirrors by reflection and to gain maximum transmission of light in the non-actuated state, the mirror plane area was planarized by a newly developed method. In this case, so-called sub-structures were introduced in the mirror layer to stabilize it mechanically, comparable to corrugated structures on macroscopic scale. For the fabrication of these micromirrors a novel process based on nanoimprint lithography (NIL) was developed. Since NIL provides rapid, economical production and fabrication on a large scale, this process will allow the future transfer to an industrial fabrication, and thus ensure commercial availability at a reasonable price for the final daylighting system based on micromirrors. open access Worapattrakul, Natalie 2016-10-28 x, 183 Seiten Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik Hillmer, Hartmut (Prof. Dr.) Lehmann, Peter (Prof. Dr.) Bangert, Axel (Prof. Dr.) Witzigmann, Bernd (Prof. Dr.) Kassel 978-3-7376-0278-5 (print) MEMS Mikrooptik Spiegel Mikrofertigung Nanoprägen Planartechnik Tageslichtsystem Spiegelsystem Mikroaktor Planarization of Micromirror Planes by Sub-Structure Implementation and Process Transfer to Nanoimprint Fabrication Technology publishedVersion true Naturwissenschaft, Technik, Informatik, Medizin Dissertation FB 16 / Elektrotechnik / Informatik true Softcover 17 x 24 cm
Die folgenden Lizenzbestimmungen sind mit dieser Ressource verbunden:
:Urheberrechtlich geschützt