Browsing Publikationen im Open Access gefördert durch die UB by Subject "MEMS"
Now showing items 1-3 of 3
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AufsatzA novel approach to construct self-assembled 3D MEMS arrays (2022-08-20)
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AufsatzStudy of Dynamics in Metallic MEMS Cantilevers - Pull-In Voltage and Actuation Speed (2023-01-13)