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Transfer characteristics of white light interferometers and confocal microscopes
Optical profilers present significant advantages in comparison with stylus profilometry and scanning probe microscopy due to their non-contacting technique and their ability to scan the entire measurement field simultaneously. However, optical profilers suffer from different systematical artifacts. The dissertation investigates the transfer characteristics of optical profilometers, namely white light interferometers and confocal microscopes. In white light interferometry dispersion in the optical system leads to ...