Electromagnetic Modeling of Nanooptical 2-D Photonic Crystal Structures in Resonant Micro-Opto-Electro-Mechanical Systems: Polarization Selectivity and Tunability

In this thesis, optical filters and cavities consisting of 2-D Photonic Crystals (PCs) are studied in the Near-Infrared (NIR) range with regard to their optical properties using the frequency domain 3-D Finite Element Method (FEM). The filter structures are Photonic Crystal Membranes (PCMs) and micromechanically tunable Fabry-Pérot-Filters (FPFs) with periodically arranged Indium Phosphide (InP)/air elements, which support Guided Resonances (GRs). The focus here is primarily on the polarization selectivity. In the case of the FPFs, the tunability is investigated additionally. The filter structures form the main part of the present thesis. Here, approaches are introduced which allow for the identification of polarization-selective spectral ranges. In addition, design rules are derived, procedures for the optimizing of the optical properties are presented, and the origin of the GRs is clarified. The aim here is to improve and extend the conventional optical characteristics of the filter structures. The last part of this thesis deals with a Photonic Crystal Cavity (PCC) consisting of Gallium Arsenide (GaAs)/air features. Emphasis is placed on eigenmodes, which are suitable for use in surface-emitting laser devices. Such a mode is investigated and characterized.