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Development, Evaluation and Optimization of Fabrication Processes for Daylight Guiding Systems Based on Micromirror Arrays

Al-Qargholi, Basim

In this work, fabrication processes for daylight guiding systems based on micromirror arrays are developed, evaluated and optimized.Two different approaches are used: At first, nanoimprint lithography is used to fabricate large area micromirrors by means of Substrate Conformal Imprint Lithography (SCIL).Secondly,a new lithography technique is developed using a novel bi-layered photomask to fabricate large area micromirror arrays. The experimental results showing a reproducible stable process, high yield, and is consuming less material, time, cost and effort.

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@phdthesis{urn:nbn:de:hebis:34-2017011151880,
  author    ={Al-Qargholi, Basim},
  title    ={Development, Evaluation and Optimization of Fabrication Processes for Daylight Guiding Systems Based on Micromirror Arrays},
  keywords ={530 and Spiegelsystem and Array and Silicium and Fotoleiter},
  copyright  ={https://rightsstatements.org/page/InC/1.0/},
  language ={en},
  school={Kassel, Universität Kassel, Fachbereich Elektrotechnik / Informatik},
  year   ={2017-01-11}
}