Date
2021-01-11Author
Hillmer, HartmutWoidt, CarstenIstock, AndréKobylinskiy, AliakseiNguyen, Duc ToanAhmed, NaureenBrunner, RobertKusserow, ThomasMetadata
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Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers
Abstract
Optical spectrometers and sensors have gained enormous gimportance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters.
The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.
The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.
Citation
In: Nanomaterials Volume 11 / Issue 1 (2021-01-11) , S. 164 ; EISSN 2079-4991Sponsorship
Gefördert durch den Publikationsfonds der Universität KasselCitation
@article{doi:10.17170/kobra-202102113197,
author={Hillmer, Hartmut and Woidt, Carsten and Istock, André and Kobylinskiy, Aliaksei and Nguyen, Duc Toan and Ahmed, Naureen and Brunner, Robert and Kusserow, Thomas},
title={Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers},
journal={Nanomaterials},
year={2021}
}
0500 Oax 0501 Text $btxt$2rdacontent 0502 Computermedien $bc$2rdacarrier 1100 2021$n2021 1500 1/eng 2050 ##0##http://hdl.handle.net/123456789/12496 3000 Hillmer, Hartmut 3010 Woidt, Carsten 3010 Istock, André 3010 Kobylinskiy, Aliaksei 3010 Nguyen, Duc Toan 3010 Ahmed, Naureen 3010 Brunner, Robert 3010 Kusserow, Thomas 4000 Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers / Hillmer, Hartmut 4030 4060 Online-Ressource 4085 ##0##=u http://nbn-resolving.de/http://hdl.handle.net/123456789/12496=x R 4204 \$dAufsatz 4170 5550 {{Optische Spektroskopie}} 5550 {{Spektrometer}} 5550 {{Nanophotonik}} 5550 {{Lithografie}} 5550 {{Linienbreite}} 7136 ##0##http://hdl.handle.net/123456789/12496
2021-02-11T13:55:15Z 2021-02-11T13:55:15Z 2021-01-11 doi:10.17170/kobra-202102113197 http://hdl.handle.net/123456789/12496 Gefördert durch den Publikationsfonds der Universität Kassel eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ nanoimprint photonic nanomaterials optical spectrometers interferometers Fabry– Pérot filters detector arrays tunable MEMS linewidth miniaturization 530 Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers Aufsatz Optical spectrometers and sensors have gained enormous gimportance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated. open access Hillmer, Hartmut Woidt, Carsten Istock, André Kobylinskiy, Aliaksei Nguyen, Duc Toan Ahmed, Naureen Brunner, Robert Kusserow, Thomas doi:10.3390/nano11010164 Optische Spektroskopie Spektrometer Nanophotonik Lithografie Linienbreite publishedVersion EISSN 2079-4991 Issue 1 Nanomaterials 164 Volume 11 false
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