Datum
2023-01-12Metadata
Zur Langanzeige
Aufsatz
Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies
Zusammenfassung
Point-wise measuring profilometers like the tactile stylus instruments or optical sensors are established measurement tools in science and industry to measure and characterize surface textures. We present a fiber-coupled laser interferometric confocal distance sensor for surface profiling. The sensor is characterized by small geometric dimensions and by its high lateral
scanning speed. The ability to measure specularly reflecting and rough surface textures are demonstrated by performing several measurements on a sinusoidal standard as well as two roughness standards specified by different degree of roughness using various lateral scan velocities up to 75 mm s-¹. These measurement results are compared to those obtained by a tactile stylus instrument used in the identical measurement environment as the introduced optical sensor. Finally, the ability for full-field measurements is presented.
scanning speed. The ability to measure specularly reflecting and rough surface textures are demonstrated by performing several measurements on a sinusoidal standard as well as two roughness standards specified by different degree of roughness using various lateral scan velocities up to 75 mm s-¹. These measurement results are compared to those obtained by a tactile stylus instrument used in the identical measurement environment as the introduced optical sensor. Finally, the ability for full-field measurements is presented.
Zitierform
In: Measurement Science and Technology Volume 34 / Number 4 (2023-01-12) eissn:1361-6501Förderhinweis
Gefördert im Rahmen des Projekts DEALZitieren
@article{doi:10.17170/kobra-202305198055,
author={Hagemeier, Sebastian and Bittner, Kai and Depiereux, Frank and Lehmann, Peter},
title={Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies},
journal={Measurement Science and Technology},
year={2023}
}
0500 Oax 0501 Text $btxt$2rdacontent 0502 Computermedien $bc$2rdacarrier 1100 2023$n2023 1500 1/eng 2050 ##0##http://hdl.handle.net/123456789/14725 3000 Hagemeier, Sebastian 3010 Bittner, Kai 3010 Depiereux, Frank 3010 Lehmann, Peter 4000 Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies / Hagemeier, Sebastian 4030 4060 Online-Ressource 4085 ##0##=u http://nbn-resolving.de/http://hdl.handle.net/123456789/14725=x R 4204 \$dAufsatz 4170 5550 {{Interferometrie}} 5550 {{Rauigkeitsmessung}} 5550 {{Faseroptik}} 7136 ##0##http://hdl.handle.net/123456789/14725
2023-05-19T09:09:48Z 2023-05-19T09:09:48Z 2023-01-12 doi:10.17170/kobra-202305198055 http://hdl.handle.net/123456789/14725 Gefördert im Rahmen des Projekts DEAL eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ high-speed sensor interferometric confocal distance sensor optical profilometer miniaturized point sensor fiber coupled sensor roughness measurement fiber optics 600 530 Miniaturized interferometric confocal distance sensor for surface profiling with data rates at ultrasonic frequencies Aufsatz Point-wise measuring profilometers like the tactile stylus instruments or optical sensors are established measurement tools in science and industry to measure and characterize surface textures. We present a fiber-coupled laser interferometric confocal distance sensor for surface profiling. The sensor is characterized by small geometric dimensions and by its high lateral scanning speed. The ability to measure specularly reflecting and rough surface textures are demonstrated by performing several measurements on a sinusoidal standard as well as two roughness standards specified by different degree of roughness using various lateral scan velocities up to 75 mm s-¹. These measurement results are compared to those obtained by a tactile stylus instrument used in the identical measurement environment as the introduced optical sensor. Finally, the ability for full-field measurements is presented. open access Hagemeier, Sebastian Bittner, Kai Depiereux, Frank Lehmann, Peter 9 Seiten doi:10.1088/1361-6501/acaf97 Interferometrie Rauigkeitsmessung Faseroptik publishedVersion eissn:1361-6501 Number 4 Measurement Science and Technology Volume 34 false 045104
Die folgenden Lizenzbestimmungen sind mit dieser Ressource verbunden:
Solange nicht anders angezeigt, wird die Lizenz wie folgt beschrieben: Namensnennung 4.0 International
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