Browsing FB 16 Elektrotechnik / Informatik by Subject "MEMS"
Now showing items 1-10 of 10
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DissertationAir-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters (2006-03-02)
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DissertationDesign and Implementation of Novel Optical Fabry-Pérot Arrays for Medical Applications (2024)
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DissertationDevelopment of RF MEMS for Innovative Applications in Microwave Systems (2018-05-28)
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DissertationEntwicklung und Herstellung eines Labor-Demonstrators für Mikrospiegel-Arrays zur Tageslichtlenkung (2018-05)
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DissertationMEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range (2012-04-23)
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DissertationOptimization in the Technological Steps for the Fabrication of Large Area Micromirror Arrays (2015-02-23)