Browsing Fachbereiche by Subject "MEMS"
Now showing items 1-11 of 11
-
DissertationAir-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters (2006-03-02)
-
DissertationDevelopment of RF MEMS for Innovative Applications in Microwave Systems (2018-05-28)
-
DissertationEntwicklung und Herstellung eines Labor-Demonstrators für Mikrospiegel-Arrays zur Tageslichtlenkung (2018-05)
-
DissertationGaInAsP-basierende Resonatorstrukturen (2006-10-27)
-
DissertationHerstellung von spannungsoptimierten Silizium-Membranen durch den elektrochemischen Ätzstopp an pn-Übergängen (2004-12-15)
-
DissertationMEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range (2012-04-23)
-
DissertationOptimization in the Technological Steps for the Fabrication of Large Area Micromirror Arrays (2015-02-23)